中国有色冶金

Cerium oxide polishing powder can form a chemical mechanical polishing (CMP) function, which meets the needs of the precision polishing field. It is characterized by a fast polishing speed, high finish, high flatness, and a long service life for polished products. In this field, the main international research directions focus on the application optimization and expansion of cerium oxide polishing powder, the influence of the size and morphology of cerium oxide particles on polishing performance, the recovery effect of the introduction of additives and cleaning methods on surface defects, and the particle size control process of polishing powder, among others. Conversely, in China, there are still shortcomings in particle size control, optimizing the production process, shortening the production cycle, and improving equipment utilization. The preparation methods of cerium oxide polishing powder are mainly solid phase, liquid phase, and gas phase. The solid phase method includes solid phase sintering and solid phase mechanical methods, which typically have higher energy consumption and longer reaction times. The liquid phase method includes hydrothermal, sol-gel, precipitation, microwave, and microemulsion methods, among others. These methods are conducted at lower temperatures and can produce polishing powder with a more uniform particle size. Nevertheless, some liquid phase methods are complex, and the treatment of solvents and by-products also needs optimization. The gas phase method mainly includes spray drying and spray pyrolysis, which can produce polishing powder with specific shapes and sizes by atomizing solutions or suspensions into fine droplets and then rapidly evaporating the solvent to form solid particles at high temperatures. With the enhancement of global environmental awareness, the development of low energy consumption and green synthesis methods has become a trend, and gas phase and other environmentally friendly synthesis methods will receive more attention. Future research will pay more attention to the particle size and morphology control of cerium oxide powder to meet the polishing needs of different fields.