中国有色冶金

Chlorosilane in polysilicon production process belongs to hazardous chemicals. In order to ensure that there is no leakage in the material transportation process, shield pump is generally selected. This paper introduces the structure of the shield pump, briefly describes the use of the shield pump in the polysilicon industry, analyzes the common faults of the shield pump, makes statistics and Analysis on the forms and causes of the faults, points out the relationship between the faults of the shield pump and the materials and production operation, and finally puts forward some improvement measures in the aspects of equipment layout, design and selection, production and use, so as to ensure that Safe and stable operation of canned motor pump.