中国有色冶金

Most of the domestic polysilicon production lines are designed and built according to the solar level polysilicon standard which does not meet the requirement for electronic grade polysilicon production. This paper analyzes the electronic grade polysilicon national standard. The main standards of electronic grade polysilicon are the concentration of impurity, minority carrier lifetime, the concentration of carbon, the concentration of oxygen, the base metal impurity, the surface metal impurity and the external quality requirement. The problems in the electronic grade polysilicon production processes are identified based on the the analysis of the influence of the above parameters, which would give guidance to the production process improvement and technology research study of the manufacture of the electronic grade polysilicon.