NOUFERROUS METALLURGICAL EQUIPMENT

M5211-6-UM vertical boron diffusion furnace is used in boron diffusion process of crystalline silicon solar cells, which has the characteristics of full automation, high capacity, low energy consumption and convenient maintenance. This paper introduces the structure and performance of this type of equipment, and gives the energy consumption and process results. The results show that the equipment has reached the leading level in China and has the conditions for industrialization.