有色设备

Using Star-CCM fluid simulation software, according to the conventional process parameters, the 3D modeling and simulation of the reaction chamber of tubular plasma enhanced chemical vapor deposition (PECVD) equipment was carried out, and the flow field distribution in the reaction chamber equipped with graphite boats of different structures was studied. Combined with the simulation data, the influence of hollow graphite boats on the film coating uniformity was verified by grouping tests. The test results show that the hollowed boats can effectively improve the airflow distribution among the center, the rear and the blade of the graphite boat, and improve the uniformity of film growth.