Abstract:Ethyl orthosilicate, which has the properties of inorganic materials and organic materials, is widely used in many fields such as chemical industry, electronics and electrical industry. The application field of electronic grade ethyl orthosilicate was mainly introduced. The product composition, particle size and impurity content of industrial grade ethyl orthosilicate and electronic grade ethyl orthosilicate were compared. In view of the quality gap between industrial grade ethyl orthosilicate and electronic grade ethyl orthosilicate, the research progress of the preparation process of electronic grade ethyl orthosilicate at home and abroad was reviewed, including complexation separation, adsorption and ion exchange, combined refining and other technologies. These technologies use industrial grade ethyl orthosilicate as raw material to obtain electronic grade ethyl orthosilicate products by effectively removing water, chloride ions, metal ions and other impurities in ethyl orthosilicate. By comparing various purification methods, the development direction of electronic grade ethyl orthosilicate purification technology was prospected.