Abstract:Electronic special gases (ESG) have dangerous characteristics such as high pressure, corrosiveness, toxicity, flammability, explosion, suffocation, etc. Because of these, accidents have occurred frequently in the filling process, endangering personnel safety. This article briefly introduced the general process of special gas filling and analyzed precautions for prefilling inspection, filling process and post filling cylinder management, as well as emergency measures during filling to improve the filling capability and safety management of electronic gas manufacturing enterprises.