Abstract:This paper introduced the comprehensive utilization technology of SiCl4, a byproduct from polysilicon production by Siemens process, and its status quo. Specifically, this paper elaborated on how SiCl4 is used to produce fumed silica, ethyl silicate, optical fiber and trichlorosilane from aspects of principles, strengths and shortcomings, issues and improvement, focused on the latest progress in SiCl4 hydrogenation technology, and put forth suggestions and solutions to difficulties in hydrogenation, pointing out the direction and providing guidance for polysilicon technology development in China.