绿色矿冶

High-purity metals are the key materials for manufacturing various of sputtering targets. The types and contents of impurities in high purity metals affect the performance of down stream products. Electron beam melting and refining(EBMR) is an effective method for metal purification. The principle, equipment and main process parameters of the technology were briefly described in this paper. The application of EBMR technology in the purification of copper, tantalum, titanium and other metals was introduced. Finally, the development tendency of EBMR technology and equipment in the future was prospected.