Abstract:As the basic material of photovoltaic industry and semiconductor industry, polycrystalline silicon has developed rapidly in recent years. As the key link of polysilicon production, the equipment and technology level, the advanced process flow and the rationality of system heat energy utilization are the important factors related to the stable production of polysilicon. This paper introduced the development process of polysilicon reduction equipment, analyzed the selection of liquid phase feeding mode and gas phase feeding mode of reduction system, and focused on the waste heat recovery and utilization technology of reduction furnace bell water, reduction tail gas and chassis water in the reduction production process, so as to provide reference for the construction and operation of polysilicon production, in order to achieve the goal of high efficiency, energy saving and green environmental protection of polysilicon reduction production.