Abstract:The control requirements of metal impurity content in electronic grade polycrystalline silicon are high, and its production process and post-treatment process are strict. The electronic grade polysilicon material will inevitably cause the problem of secondary metal introduction in the crushing treatment, so it is particularly important to clean the broken electronic grade polysilicon material. This paper analyzed the factors affecting the cleaning quality of electronic grade polysilicon materials, including cleaning process,cleaning agent selection,cleaning equipment material, environmental cleanliness and human operation factors, and put forward corresponding control measures.