绿色矿冶

Silicon-based materials are one of the key materials in integrated circuit processes, which are widely used in epitaxy, chemical vapor deposition, ion implantation, doping, etching, cleaning, and mask generation and other processes. The purity of silicon-based materials directly affects the performance, integration and yield of integrated circuits. In this paper, the principle and application progress of separation and purification technologies which are widely used in silicon-based materials for integrated circuits were described, including adsorption distillation, complexation distillation, sub-boiling distillation, vacuum distillation, photochlorination, cyclic filtration, etc. The advantages and disadvantages of various separation and purification technologies were compared, and the prospect of purification of silicon-based materials was analyzed and prospected.